Fundamentals of microfabrication and nanotechnology /

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"Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical contex...

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Bibliografiska uppgifter
Huvudupphovsman: Madou, Marc J.
Materialtyp: Printed Book
Språk:English
Publicerad: Boca Raton, FL : CRC Press, c2012.
Upplaga:3rd ed.
Ämnen:
Microelectromechanical systems.
Nanoelectromechanical systems.
Microfluidics.
Solid state physics.
Länkar:http://pda.library.cornell.edu/coutts/pod.cgi?CouttsID=cou7021486

Internet

http://pda.library.cornell.edu/coutts/pod.cgi?CouttsID=cou7021486

University of Calicut

Beståndsuppgifter i University of Calicut
Signum: 620/.5 MAR/M
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