Fundamentals of microfabrication and nanotechnology /

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"Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical contex...

Deskribapen osoa

Xehetasun bibliografikoak
Egile nagusia: Madou, Marc J.
Formatua: Printed Book
Hizkuntza:English
Argitaratua: Boca Raton, FL : CRC Press, c2012.
Edizioa:3rd ed.
Gaiak:
Microelectromechanical systems.
Nanoelectromechanical systems.
Microfluidics.
Solid state physics.
Sarrera elektronikoa:http://pda.library.cornell.edu/coutts/pod.cgi?CouttsID=cou7021486

Internet

http://pda.library.cornell.edu/coutts/pod.cgi?CouttsID=cou7021486

University of Calicut

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