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Fundamentals of microfabrication and nanotechnology /
"Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical contex...
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| Format: | Printed Book |
| Sprache: | English |
| Veröffentlicht: |
Boca Raton, FL :
CRC Press,
c2012.
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| Ausgabe: | 3rd ed. |
| Schlagworte: | |
| Online Zugang: | http://pda.library.cornell.edu/coutts/pod.cgi?CouttsID=cou7021486 |
Online
http://pda.library.cornell.edu/coutts/pod.cgi?CouttsID=cou7021486University of Calicut
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620/.5 MAR/M |
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