Fundamentals of microfabrication and nanotechnology /

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"Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical contex...

Disgrifiad llawn

Manylion Llyfryddiaeth
Prif Awdur: Madou, Marc J.
Fformat: Printed Book
Iaith:English
Cyhoeddwyd: Boca Raton, FL : CRC Press, c2012.
Rhifyn:3rd ed.
Pynciau:
Microelectromechanical systems.
Nanoelectromechanical systems.
Microfluidics.
Solid state physics.
Mynediad Ar-lein:http://pda.library.cornell.edu/coutts/pod.cgi?CouttsID=cou7021486

Rhyngrwyd

http://pda.library.cornell.edu/coutts/pod.cgi?CouttsID=cou7021486

University of Calicut

Manylion daliadau o University of Calicut
Rhif Galw: 620/.5 MAR/M
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Copi Nid yw'r Statws Byw ar Gael
Copi Nid yw'r Statws Byw ar Gael

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