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Fundamentals of microfabrication and nanotechnology /
"Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical contex...
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| 格式: | Printed Book |
| 語言: | English |
| 出版: |
Boca Raton, FL :
CRC Press,
c2012.
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| 版: | 3rd ed. |
| 主題: | |
| 在線閱讀: | http://pda.library.cornell.edu/coutts/pod.cgi?CouttsID=cou7021486 |
書本目錄:
- v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
- v. 2. Manufacturing techniques for microfabrication and nanotechnology
- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications.