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| LEADER |
00717nam a22001577a 4500 |
| 020 |
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|a 978-81-8489-413-4
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| 082 |
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|a 621.381 BRO/P
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| 100 |
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|a Brodie, Ivor and Muray, Julius J.
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| 245 |
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|a The Physics of Micro/Nano-Fabrication
|c Ivor Brodie and Julius J. Muray
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| 260 |
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|a Plenum Press, New York
|b Springer
|c 1992
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| 300 |
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|a xix,650p.
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| 700 |
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|a Ivor Brodie and Julius J. Muray
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| 942 |
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|c BK
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| 999 |
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|c 260174
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