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Metal impurities in silicon-device fabrication/
| Main Author: | |
|---|---|
| Format: | Printed Book |
| Published: |
Berlin
Springer
2000
|
| LEADER | 00413 a2200109 4500 | ||
|---|---|---|---|
| 082 | |2 2nd |a 620.11 GRA/M | ||
| 100 | |q Graff Klaus | ||
| 245 | |a Metal impurities in silicon-device fabrication/ |c by Klaus Graff | ||
| 260 | |a Berlin |b Springer |c 2000 | ||
| 942 | |2 ddc |c BK | ||
| 999 | |c 167438 |d 167438 | ||
| 952 | |0 0 |1 0 |2 ddc |4 0 |6 548_000000000000000_GRA_M |7 0 |9 185085 |a PHY |b PHY |c ST1 |d 2010-06-19 |i 3764 |l 0 |o 548 GRA/M |p PHY3764 |r 2010-06-19 |w 2010-06-19 |y BK | ||