Microlothography: science and technology

Bibliografiska uppgifter
Huvudupphovsmän: Sheats, James R; Editor, Smith, Bruce W; Editor
Materialtyp: Printed Book
Publicerad: New York, Marcel Dekker, Inc 1998
Ämnen:
Integrated circuits-Masks
Manufacturing processes
Metal oxide semiconductors, Complementary-Design and construction
Microlithography

MG University

Beståndsuppgifter i MG University
Signum: 621.381 531 N8
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