Microlothography: science and technology

Bibliographic Details
Main Authors:	Sheats, James R; Editor, Smith, Bruce W; Editor
Format:	Printed Book
Published:	New York, Marcel Dekker, Inc 1998
Subjects:	Integrated circuits-Masks Manufacturing processes Metal oxide semiconductors, Complementary-Design and construction Microlithography

Holdings details from MG University
Call Number:	621.381 531 N8
Copy	Live Status Unavailable

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