Microlothography: science and technology

Bibliografske podrobnosti
Main Authors: Sheats, James R; Editor, Smith, Bruce W; Editor
Format: Printed Book
Izdano: New York, Marcel Dekker, Inc 1998
Teme:
Integrated circuits-Masks
Manufacturing processes
Metal oxide semiconductors, Complementary-Design and construction
Microlithography

MG University

Podrobnosti zaloge MG University
Signatura: 621.381 531 N8
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