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Microlothography: science and technology

Detalles Bibliográficos
Main Authors:	Sheats, James R; Editor, Smith, Bruce W; Editor
Formato:	Printed Book
Publicado:	New York, Marcel Dekker, Inc 1998
Subjects:	Integrated circuits-Masks Manufacturing processes Metal oxide semiconductors, Complementary-Design and construction Microlithography

Detalle de Existencias desde MG University
Número de Clasificación:	621.381 531 N8
Copia	Live Status Unavailable

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