Microlothography: science and technology

Sonraí Bibleagrafaíochta
Main Authors: Sheats, James R; Editor, Smith, Bruce W; Editor
Formáid: Printed Book
Foilsithe: New York, Marcel Dekker, Inc 1998
Ábhair:
Integrated circuits-Masks
Manufacturing processes
Metal oxide semiconductors, Complementary-Design and construction
Microlithography

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