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| LEADER |
008850000a22002530004500 |
| 020 |
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|a 978-0-8247-9953-4
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| 082 |
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|a 621.381 531 N8
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| 100 |
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|a Sheats, James R; Editor
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| 100 |
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|a Smith, Bruce W; Editor
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| 245 |
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|a Microlothography: science and technology
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| 250 |
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| 260 |
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|a New York, Marcel Dekker, Inc
|e 1998
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| 260 |
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|c 1998
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| 460 |
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|a xii, 780p
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| 465 |
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|a Rs.7500.00
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| 500 |
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|a ed by James R Sheats and Bruce W Smith
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| 500 |
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|a Includes bibliographial references and index
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| 650 |
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|a Integrated circuits-Masks
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| 650 |
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|a Manufacturing processes
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| 650 |
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|a Metal oxide semiconductors, Complementary-Design and construction
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| 650 |
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|a Microlithography
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| 942 |
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|c BK
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| 999 |
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|c 48341
|d 48341
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| 952 |
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|0 0
|1 0
|4 0
|6 621_381000000000000_531_N8
|7 0
|8 ENG
|9 49073
|a MGUL
|b MGUL
|d 2013-07-16
|e Rs.7500.00
|l 0
|o 621.381 531 N8
|p 46572
|r 2013-07-16
|w 2013-07-16
|y BK
|