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Microlothography: science and technology

Bibliographic Details
Main Authors: Sheats, James R; Editor, Smith, Bruce W; Editor
Format: Printed Book
Published: New York, Marcel Dekker, Inc 1998
Subjects:
LEADER 008850000a22002530004500
020 |a 978-0-8247-9953-4 
082 |a 621.381 531 N8 
100 |a Sheats, James R; Editor 
100 |a Smith, Bruce W; Editor 
245 |a Microlothography: science and technology 
250
260 |a New York, Marcel Dekker, Inc  |e 1998 
260 |c 1998 
460 |a xii, 780p 
465 |a Rs.7500.00 
500 |a ed by James R Sheats and Bruce W Smith 
500 |a Includes bibliographial references and index 
650 |a Integrated circuits-Masks 
650 |a Manufacturing processes 
650 |a Metal oxide semiconductors, Complementary-Design and construction 
650 |a Microlithography 
942 |c BK 
999 |c 48341  |d 48341 
952 |0 0  |1 0  |4 0  |6 621_381000000000000_531_N8  |7 0  |8 ENG  |9 49073  |a MGUL  |b MGUL  |d 2013-07-16  |e Rs.7500.00  |l 0  |o 621.381 531 N8  |p 46572  |r 2013-07-16  |w 2013-07-16  |y BK