Microlothography: science and technology

Podrobná bibliografie
Hlavní autoři: Sheats, James R; Editor, Smith, Bruce W; Editor
Médium: Printed Book
Vydáno: New York, Marcel Dekker, Inc 1998
Témata:
Integrated circuits-Masks
Manufacturing processes
Metal oxide semiconductors, Complementary-Design and construction
Microlithography
Popis
Popis jednotky:ed by James R Sheats and Bruce W Smith
Includes bibliographial references and index
ISBN:978-0-8247-9953-4

Podobné jednotky