Microlothography: science and technology

Bibliographic Details
Main Authors: Sheats, James R; Editor, Smith, Bruce W; Editor
Format: Printed Book
Published: New York, Marcel Dekker, Inc 1998
Subjects:
Integrated circuits-Masks
Manufacturing processes
Metal oxide semiconductors, Complementary-Design and construction
Microlithography
Description
Item Description:ed by James R Sheats and Bruce W Smith
Includes bibliographial references and index
ISBN:978-0-8247-9953-4

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