APA Zitierstil

Sheats, J. R. E., & Smith, B. W. E. (1998). Microlothography: Science and technology.

Chicago Zitierstil

Sheats, James R; Editor, und Bruce W; Editor Smith. Microlothography: Science and Technology. New York, Marcel Dekker, Inc, 1998.

MLA Zitierstil

Sheats, James R; Editor, und Bruce W; Editor Smith. Microlothography: Science and Technology. 1998.