Sheats, J. R. E., & Smith, B. W. E. (1998). Microlothography: Science and technology.
Chicago Edition CitationSheats, James R; Editor, i Bruce W; Editor Smith. Microlothography: Science and Technology. New York, Marcel Dekker, Inc, 1998.
Cita MLASheats, James R; Editor, i Bruce W; Editor Smith. Microlothography: Science and Technology. 1998.
Atenció: Aquestes cites poden no estar 100% correctes.