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Fundamentals of microfabrication and nanotechnology: from MEMS to Bio-MEMS and Bio-NEMS-manufacturing techniques and applications/
"Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical contex...
| 主要作者: | |
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| 格式: | Printed Book |
| 出版: |
Boca Raton:
CRC Press,
2012.
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| 版: | 3rd ed. |
| 主題: | |
| 在線閱讀: | https://books.google.co.in/books?hl=en&lr=&id=U_YBgKww2UwC&oi=fnd&pg=PP1&dq=fundamentals+of+microfabrication+and+nanotechnology&ots=2f6fIx29d3&sig=OGVGyRzIe8PeCwA3yqdQ4STRmDk#v=onepage&q=fundamentals%20of%20microfabrication%20and%20nanotechnology&f=false |
因特網
https://books.google.co.in/books?hl=en&lr=&id=U_YBgKww2UwC&oi=fnd&pg=PP1&dq=fundamentals+of+microfabrication+and+nanotechnology&ots=2f6fIx29d3&sig=OGVGyRzIe8PeCwA3yqdQ4STRmDk#v=onepage&q=fundamentals%20of%20microfabrication%20and%20nanotechnology&f=falseMG University
| 索引號: |
620.5 Q25 |
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| 復印件 | Live Status Unavailable |