Fundamentals of microfabrication and nanotechnology: from MEMS to Bio-MEMS and Bio-NEMS-manufacturing techniques and applications/

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"Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical contex...

Disgrifiad llawn

Manylion Llyfryddiaeth
Prif Awdur: Madou, Marc J.
Fformat: Printed Book
Cyhoeddwyd: Boca Raton: CRC Press, 2012.
Rhifyn:3rd ed.
Pynciau:
Microelectromechanical systems.
Nanoelectromechanical systems.
Microfluidics.
Solid state physics.
Mynediad Ar-lein:https://books.google.co.in/books?hl=en&lr=&id=U_YBgKww2UwC&oi=fnd&pg=PP1&dq=fundamentals+of+microfabrication+and+nanotechnology&ots=2f6fIx29d3&sig=OGVGyRzIe8PeCwA3yqdQ4STRmDk#v=onepage&q=fundamentals%20of%20microfabrication%20and%20nanotechnology&f=false

Rhyngrwyd

https://books.google.co.in/books?hl=en&lr=&id=U_YBgKww2UwC&oi=fnd&pg=PP1&dq=fundamentals+of+microfabrication+and+nanotechnology&ots=2f6fIx29d3&sig=OGVGyRzIe8PeCwA3yqdQ4STRmDk#v=onepage&q=fundamentals%20of%20microfabrication%20and%20nanotechnology&f=false

MG University

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