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Fundamentals of microfabrication and nanotechnology: from MEMS to Bio-MEMS and Bio-NEMS-manufacturing techniques and applications/
"Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical contex...
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| Format: | Printed Book |
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Boca Raton:
CRC Press,
2012.
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| Edition: | 3rd ed. |
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| Online Access: | https://books.google.co.in/books?hl=en&lr=&id=U_YBgKww2UwC&oi=fnd&pg=PP1&dq=fundamentals+of+microfabrication+and+nanotechnology&ots=2f6fIx29d3&sig=OGVGyRzIe8PeCwA3yqdQ4STRmDk#v=onepage&q=fundamentals%20of%20microfabrication%20and%20nanotechnology&f=false |
Table of Contents:
- v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
- v. 2. Manufacturing techniques for microfabrication and nanotechnology
- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications.