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00799 a2200229 4500 |
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20151026133352.0 |
| 008 |
150401b xxu||||| |||| 00| 0 eng d |
| 020 |
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|a 9783527334995
|
| 080 |
|
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|a 621.3.049.77
|b BRA
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| 100 |
|
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|a Brand, Oliver
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| 245 |
|
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|a CMOS-MEMS
|c Oliver Brand and Gary K. Fedder
|
| 260 |
|
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|c 2013
|b Wiley-VCH Verlag
|a Germany
|
| 300 |
|
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|a xiv, 594p.
|
| 490 |
|
|
|a Advanced micro and nanosystems
|
| 653 |
|
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|a Integrated circuits design
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| 653 |
|
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|a CMOS-MEMS-Biological and chemical application
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| 653 |
|
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|a Microelectromechanical systems
|
| 653 |
|
|
|a CMOS based sensors
|
| 700 |
|
|
|a Fedder, Gary K; ed.
|
| 942 |
|
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|c BK
|6 _
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| 999 |
|
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|c 69373
|d 69373
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| 952 |
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|b UL
|d 2015-02-19
|g 0.00
|o 621.3.049.77 BRA
|p 00072767
|r 2015-02-19
|v 0.00
|w 2015-02-19
|y BK
|