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Plasma electronics applications in microelectronic device fabrication

Dades bibliogràfiques
Autor principal:	Makabe, Toshiaki
Altres autors:	Petrovic, Zoran Lj; ed. by
Format:	Printed Book
Idioma:	English
Publicat:	New York CRC Press 2015
Edició:	2nd ed.
Matèries:	Plasma engineering Low temperature plasma Plasma processing

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