Plasma electronics applications in microelectronic device fabrication

Bibliographic Details
Main Author: Makabe, Toshiaki
Other Authors: Petrovic, Zoran Lj; ed. by
Format: Printed Book
Language:English
Published: New York CRC Press 2015
Edition:2nd ed.
Subjects:
Plasma engineering
Low temperature plasma
Plasma processing

UL

Holdings details from UL
Call Number: 533.922 MAK
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