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20151026133352.0 |
| 008 |
150131b xxu||||| |||| 00| 0 eng d |
| 020 |
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|a 9781482222050
|
| 080 |
|
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|a 533.922
|b MAK
|
| 100 |
|
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|a Makabe, Toshiaki
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| 245 |
|
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|a Plasma electronics
|b applications in microelectronic device fabrication
|c Toshiaki Makabe and Zoran Lj Petrovic
|
| 250 |
|
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|a 2nd ed.
|
| 260 |
|
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|c 2015
|b CRC Press
|a New York
|
| 300 |
|
|
|a xxxv, 376p.
|
| 653 |
|
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|a Plasma engineering
|
| 653 |
|
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|a Low temperature plasma
|
| 653 |
|
|
|a Plasma processing
|
| 700 |
|
|
|a Petrovic, Zoran Lj; ed. by
|
| 942 |
|
|
|c BK
|6 _
|
| 999 |
|
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|c 69370
|d 69370
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| 952 |
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|1 0
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|9 81494
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|b UL
|d 2014-12-15
|g 0.00
|o 533.922 MAK
|p 00072239
|r 2015-01-31
|v 0.00
|w 2014-12-15
|y BK
|