Á lódáil...
Plasma electronics applications in microelectronic device fabrication
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| Údair Eile: | |
| Formáid: | Printed Book |
| Teanga: | English |
| Foilsithe: |
New York
CRC Press
2015
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| Eagrán: | 2nd ed. |
| Ábhair: |
| Cur Síos Fisiciúil: | xxxv, 376p. |
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| ISBN: | 9781482222050 |