Nalaganje...
Plasma electronics applications in microelectronic device fabrication
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| Format: | Printed Book |
| Jezik: | English |
| Izdano: |
New York
CRC Press
2015
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| Izdaja: | 2nd ed. |
| Teme: |
| Fizični opis: | xxxv, 376p. |
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| ISBN: | 9781482222050 |