Makabe, T., & Petrovic, Z. L. e. b. (2015). Plasma electronics: Applications in microelectronic device fabrication (2nd ed.). CRC Press.
Chicago ZitierstilMakabe, Toshiaki, und Zoran Lj; ed. by Petrovic. Plasma Electronics: Applications in Microelectronic Device Fabrication. 2nd ed. New York: CRC Press, 2015.
MLA ZitierstilMakabe, Toshiaki, und Zoran Lj; ed. by Petrovic. Plasma Electronics: Applications in Microelectronic Device Fabrication. 2nd ed. CRC Press, 2015.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.