Makabe, T., & Petrovic, Z. L. e. b. (2015). Plasma electronics: Applications in microelectronic device fabrication (2nd ed.). CRC Press.
Dyfyniad Arddull ChicagoMakabe, Toshiaki, and Zoran Lj; ed. by Petrovic. Plasma Electronics: Applications in Microelectronic Device Fabrication. 2nd ed. New York: CRC Press, 2015.
Dyfyniad MLAMakabe, Toshiaki, and Zoran Lj; ed. by Petrovic. Plasma Electronics: Applications in Microelectronic Device Fabrication. 2nd ed. CRC Press, 2015.
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