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Studies on laser induced and RF sputtered plasma using optical emission spectroscopy and langmuir probe

Dades bibliogràfiques
Autor principal:	Joshy, N V
Altres autors:	Jayaraj, M K; guided by
Format:	Ph.D Thesis
Idioma:	English
Publicat:	Kochi Department of Physics; CUSAT 2008
Matèries:	Plasma physics Radio frequency sputtering system

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