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Fundamentals of microfabrication and nanotechnology

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书目详细资料
主要作者:	Madou, Marc J
格式:	Printed Book
语言:	English
出版:	Boca Raton CRC Press 2012
版:	3rd ed.
主题:	Microelectromechanical systems Nano electromechanical systems Microfluidics Solidstate physics

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