Loading...
Fundamentals of microfabrication and nanotechnology
| Hovedforfatter: | |
|---|---|
| Format: | Printed Book |
| Sprog: | English |
| Udgivet: |
Boca Raton
CRC Press
2012
|
| Udgivelse: | 3rd ed. |
| Fag: |
| Emne beskrivelse: | V1. Solid state physics, fluidics and analytical techniques in micro and nanotechnology V2.Manufacturing techniques for microfabrication and nano technology V3. From Mems to Bio-MEMS and Bio-NEMS |
|---|---|
| Fysisk beskrivelse: | 3v. |
| ISBN: | 978142005545 |