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Fundamentals of microfabrication and nanotechnology
| Autor principal: | |
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| Format: | Printed Book |
| Idioma: | English |
| Publicat: |
Boca Raton
CRC Press
2012
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| Edició: | 3rd ed. |
| Matèries: |
| Descripció de l’ítem: | V1. Solid state physics, fluidics and analytical techniques in micro and nanotechnology V2.Manufacturing techniques for microfabrication and nano technology V3. From Mems to Bio-MEMS and Bio-NEMS |
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| Descripció física: | 3v. |
| ISBN: | 978142005545 |