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adlib96000001 |
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20151026132426.0 |
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| 020 |
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|a 9780815515548
|
| 022 |
|
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| 040 |
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|a Adlib
|
| 082 |
|
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|a 621.315.617
|
| 245 |
|
|
|a Handbook of silicon wafer cleaning technology
|
| 250 |
|
|
|a 2nd
|
| 260 |
|
|
|a Norwich
|b William Andrew
|c 2008
|
| 300 |
|
|
|a xxvi, 718p
|
| 500 |
|
|
|a
|
| 100 |
|
|
|a Reinhardt, Karen. A.
|e ed.by
|
| 700 |
|
|
|a Kern, Werner
|
| 942 |
|
|
|c BK
|6 _
|
| 653 |
|
|
|a Silcon-on-insulator technology
|a Silicon wafer
|a Dry cleaning
|a Wet chemical processes
|a Plasma stripping
|
| 999 |
|
|
|c 48523
|d 48523
|
| 952 |
|
|
|0 0
|1 0
|4 0
|6 621315617_REI
|7 0
|9 61171
|a UL
|b UL
|d 2010-06-16
|o 621.315.617 REI
|p 00062284
|r 2010-06-16
|w 2010-06-16
|y BK
|