Handbook of silicon wafer cleaning technology

Bibliographic Details
Main Author: Reinhardt, Karen. A. (ed.by)
Other Authors: Kern, Werner
Format: Printed Book
Language:English
Published: Norwich William Andrew 2008
Edition:2nd
Subjects:
Silcon-on-insulator technology > Silicon wafer > Dry cleaning > Wet chemical processes > Plasma stripping
Description
Item Description:
Physical Description:xxvi, 718p
ISBN:9780815515548

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