Reliability of MEMS:testing of materials and devices

Bibliographic Details
Main Author:	Tabata,Osamu (ed.by)
Other Authors:	Tsuchiya, Toshiyuki
Format:	Printed Book
Language:	English
Published:	Weinheim Wiley-VCH Verlag GmbH & Co. KGaA 2008
Subjects:	Microelectromechanical systems-Reliability


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