Reliability of MEMS:testing of materials and devices

Bibliographic Details
Main Author: Tabata,Osamu (ed.by)
Other Authors: Tsuchiya, Toshiyuki
Format: Printed Book
Language:English
Published: Weinheim Wiley-VCH Verlag GmbH & Co. KGaA 2008
Subjects:
Microelectromechanical systems-Reliability

UL

Holdings details from UL
Call Number: 621.382 TAB
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