Tabata,Osamu, & Tsuchiya, T. (2008). Reliability of MEMS: Testing of materials and devices. Wiley-VCH Verlag GmbH & Co. KGaA.
Chicago Edition CitationTabata,Osamu, and Toshiyuki Tsuchiya. Reliability of MEMS: Testing of Materials and Devices. Weinheim: Wiley-VCH Verlag GmbH & Co. KGaA, 2008.
MLA Edition CitationTabata,Osamu, and Toshiyuki Tsuchiya. Reliability of MEMS: Testing of Materials and Devices. Wiley-VCH Verlag GmbH & Co. KGaA, 2008.
Warning: These citations may not always be 100% accurate.