MEMS and microsystems: design and manufacture

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Detalhes bibliográficos
Autor principal: Hsu, Tai-Ran
Formato: Printed Book
Idioma:English
Publicado em: New Delhi Tata McGraw- Hill 2005
Assuntos:
Microelectronics > Electronics > Semiconductors > Microelectromechanical systems > MEMS > Microelectronic packaging
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Mems and microsystems design and manufacture /
por Hsu, Tai-ran
Publicado em 2002
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