MEMS and microsystems: design and manufacture

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Détails bibliographiques
Auteur principal: Hsu, Tai-Ran
Format: Printed Book
Langue:English
Publié: New Delhi Tata McGraw- Hill 2005
Sujets:
Microelectronics > Electronics > Semiconductors > Microelectromechanical systems > MEMS > Microelectronic packaging
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Mems and microsystems design and manufacture /
par Hsu, Tai-ran
Publié 2002
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