MEMS and microsystems: design and manufacture

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Xehetasun bibliografikoak
Egile nagusia: Hsu, Tai-Ran
Formatua: Printed Book
Hizkuntza:English
Argitaratua: New Delhi Tata McGraw- Hill 2005
Gaiak:
Microelectronics > Electronics > Semiconductors > Microelectromechanical systems > MEMS > Microelectronic packaging
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Mems and microsystems design and manufacture /
nork Hsu, Tai-ran
Argitaratua 2002
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