MEMS and microsystems: design and manufacture

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Manylion Llyfryddiaeth
Prif Awdur: Hsu, Tai-Ran
Fformat: Printed Book
Iaith:English
Cyhoeddwyd: New Delhi Tata McGraw- Hill 2005
Pynciau:
Microelectronics > Electronics > Semiconductors > Microelectromechanical systems > MEMS > Microelectronic packaging
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Mems and microsystems design and manufacture /
gan Hsu, Tai-ran
Cyhoeddwyd 2002
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