MEMS and microsystems: design and manufacture

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Bibliographic Details
Main Author: Hsu, Tai-Ran
Format: Printed Book
Language:English
Published: New Delhi Tata McGraw- Hill 2005
Subjects:
Microelectronics > Electronics > Semiconductors > Microelectromechanical systems > MEMS > Microelectronic packaging
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Mems and microsystems design and manufacture /
by Hsu, Tai-ran
Published 2002
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