MEMS and microsystems: design and manufacture

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書目詳細資料
主要作者: Hsu, Tai-Ran
格式: Printed Book
語言:English
出版: New Delhi Tata McGraw- Hill 2005
主題:
Microelectronics > Electronics > Semiconductors > Microelectromechanical systems > MEMS > Microelectronic packaging
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Mems and microsystems design and manufacture /
由 Hsu, Tai-ran
出版 2002
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