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MEMS and microsystems: design and manufacture

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書目詳細資料
主要作者:	Hsu, Tai-Ran
格式:	Printed Book
語言:	English
出版:	New Delhi Tata McGraw- Hill 2005
主題:	Microelectronics > Electronics > Semiconductors > Microelectromechanical systems > MEMS > Microelectronic packaging

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