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MEMS and microsystems: design and manufacture

Detalhes bibliográficos
Autor principal:	Hsu, Tai-Ran
Formato:	Printed Book
Idioma:	English
Publicado em:	New Delhi Tata McGraw- Hill 2005
Assuntos:	Microelectronics > Electronics > Semiconductors > Microelectromechanical systems > MEMS > Microelectronic packaging

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