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MEMS and microsystems: design and manufacture

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Dades bibliogràfiques
Autor principal:	Hsu, Tai-Ran
Format:	Printed Book
Idioma:	English
Publicat:	New Delhi Tata McGraw- Hill 2005
Matèries:	Microelectronics > Electronics > Semiconductors > Microelectromechanical systems > MEMS > Microelectronic packaging

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