Hitchon, W. N. G. (1999). Plasma processes for semiconductor fabrication. Cambridge University Press.
Chicago Style citaatHitchon, W. Nicholas G. Plasma Processes for Semiconductor Fabrication. Cambridge: Cambridge University Press, 1999.
MLA citatieHitchon, W. Nicholas G. Plasma Processes for Semiconductor Fabrication. Cambridge University Press, 1999.
Let op: Deze citaties zijn niet altijd 100% accuraat.