Hitchon, W. N. G. (1999). Plasma processes for semiconductor fabrication. Cambridge University Press.
シカゴスタイル引用形Hitchon, W. Nicholas G. Plasma Processes for Semiconductor Fabrication. Cambridge: Cambridge University Press, 1999.
MLA引用形式Hitchon, W. Nicholas G. Plasma Processes for Semiconductor Fabrication. Cambridge University Press, 1999.
警告: この引用は必ずしも正確ではありません.