Hitchon, W. N. G. (1999). Plasma processes for semiconductor fabrication. Cambridge University Press.
Chicago Edition CitationHitchon, W. Nicholas G. Plasma Processes for Semiconductor Fabrication. Cambridge: Cambridge University Press, 1999.
Deismireacht MLAHitchon, W. Nicholas G. Plasma Processes for Semiconductor Fabrication. Cambridge University Press, 1999.
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