Style de citation APA

Hitchon, W. N. G. (1999). Plasma processes for semiconductor fabrication. Cambridge University Press.

Style de citation Chicago

Hitchon, W. Nicholas G. Plasma Processes for Semiconductor Fabrication. Cambridge: Cambridge University Press, 1999.

Style de citation MLA

Hitchon, W. Nicholas G. Plasma Processes for Semiconductor Fabrication. Cambridge University Press, 1999.