APA Edition Citation

Hitchon, W. N. G. (1999). Plasma processes for semiconductor fabrication. Cambridge University Press.

Chicago Edition Citation

Hitchon, W. Nicholas G. Plasma Processes for Semiconductor Fabrication. Cambridge: Cambridge University Press, 1999.

MLA Edition Citation

Hitchon, W. Nicholas G. Plasma Processes for Semiconductor Fabrication. Cambridge University Press, 1999.